Технология измерений
Технология измерений
MarSurf FI 3100 VB
Характеристики изделия
Simultaneous Phase-Shifting for Vibration-Insensitive Measurements in Production
The MarSurf FI 3100 VB simultaneous phase-shifting Fizeau interferometer is a real-time, high-speed, truly vibration-insensitive metrology instrument with shutter speeds as fast as 10 µs. Ideally suited for shop/production floors, the MarSurf FI 3100 VB offers unsurpassed measurement accuracy, stability and repeatability. Mahr's new SPARC technology ensures measurement errors of less than λ / 100 with no vibration isolation.

  • Absolute vibration insensitivity
  • Common path Fizeau geometry
  • Can measure surfaces with 0.1% to 100% reflectivity
  • Automated stress measurement 10 µs exposure times
  • 1k x 1k resolution
  • Compatible with all industry standard 4" (100 mm) reference optics and accessories
  • Области применения

  • Measurements of flat, concave and convex surfaces of any size
  • Measurements over long distances, including in vacuum chambers
  • In-situ measurements of optical, machined and wafer surfaces
  • Dynamic measurements for thermodynamic events, moving objects, etc.
  • Characterization & removal of birefringence effects